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GASONICS

Part NumberDescription
06-0091-01
PLASMA CHAMBER
06-0142
MIDDLE SHOWERHEAD PLATE
06-2431/A
QUARTZ PIN
14738-01
QUARTZ BUBBLER
16159-02
ANODE COPPER SHIELD
16337-01
QUARTZ CHAMBER LINER
16337-02
QUARTZ CHAMBER LINER
16532-01
QUARTZ LAMP PLATE
16784-01
SPOOLER
17302-01
WELDMONT TOP SHOWERHEAD
17303-01
QUARTZ SHOWERHEAD
17304-01
WELDMONT BOTTOM SHOWERHEAD
17621-01
PLATE GAS DISTRIBUTION, QUARTZ
17622-01
DIFFUSER QUARTZ PLATE
A06-001-01
WINDOW VENTED, QUARTZ
A06-002-01
WINDOW, QUARTZ
A06-005-01
SHOWERHEAD, QUARTZ
A06-010-01
ASHER TUBE
A06-012-01
DIFFUSION DISK, QUARTZ
A06-300-01
QUARTZ WINDOW 9 1/2
A06-301-01
QUARTZ WINDOW 10"


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