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LAM RESEARCH

Part NumberDescription
2101363
WAFER CLAMP
601124
BAFFLE
601179
BAFFLE PLATE
601187
PLATE-DIFF, ANOD (100, 125, 150MM)
601224
DIFFUSER PLATE
602250
BAFFLE PLATE TOP
713-004108-001
ANODE PLUG, TEFLON
713-011545-002
SLEEVE, PLUNGER GUIDE
713-011546-002
SLEEVE, PLUNGER GUIDE
713-011548-001
SLEEVE, PLUNGER GUIDE
713-011558-001
RING, ELECTRODE INSULATOR
713-011560-001
RING, SHROUD
713-011564-002
SLEEVE, PLUNGER GUIDE
713-011572-001
INSERT, THREAD SCREW
713-011574-001
PLUNGER, WAFER CLAMP
713-011575-001
NUT, RETAINER
713-011576-001
ALIGNMENT PIN, CLAMP
713-011577-001
WASHER, CLAMP RETAINING
713-011578-001
SLEEVE, PLUNGER GUIDE
713-011578-003
SLEEVE, PLUNGER GUIDE
713-011579-001
GUIDE, PLUNGER
713-011584-001
PLUNGER, WAFER CLAMP
713-011585-001
COVER, CLAMP BOLT
713-011585-004
COVER, BOLT CLAMP
713-011752-001
INSERT, 6-32 THREAD
713-011760-001
WASHER, EDGE, FOCUS, RING
713-011803-002
RING, ELECTRODE CLAMP
713-011926-001
CAP, BOLT ELEC.
713-011928-001
CAP BOLT ELECTRODE
713-011980-001
HOUSING, PLUNGER

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