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MATRIX

Part NumberDescription
95-16564
150 VALVE ASSEMBLY
992-40281
ELECTRODE, SLOTTED UPPER
992-40306
SLOTTED ELECT. W/FLAME UPPER
992-40410
ELECTRODE SLOTTED LASER POINT
992-60073
CERAMIC SPACER
992-60101
QUARTZ CHAMBER
992-60110
QUARTZ CHAMBER
992-60137
WAFER LIFT PIN
992-60147
QUARTZ CHAMBER
992-60207
QUARTZ CHAMBER 8"
992-60239
RING, QUARTZ IBM
992-60294
REACTOR, QUARTZ MICROWAVE
992-60309
QUARTZ BAFFLE
992-60310
QUARTZ BAFFLE
992-60335
TUBE, SHORT GAS INLET, MICROWAVE
992-60417
QUARTZ BAFFLE (60 HOLE)
992-60419
QUARTZ BAFFLE
992-60425
RING, CHUCK CERAMIC
992-60426
RING, VACUUM, BAFFLE CERAMIC
992-60427
INSULATOR, CHUCK CERAMIC
992-60439
PLATE, QUARTZ BAFFLE
992-60444
REACTOR, QTZ, MICROWAVE
992-70051
ELECTRODE, POSITIVE
992-70275
CHAMBER GRID
992-70276
GRID, UPPER
992-70348
ELECTRODE
994-60005
CHAMBER DOOR O'RING
994-60007
QUARTZ CHAMBER O'RING
994-60034
VAC VALVE MT O'RING
994-60035
CHAMBER DOOR O'RING

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