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NOVELLUS

Part NumberDescription
02-00008-00
KIT, 200MM GAS DISP PLATE ADJ.
02-00063-00
COPPER ROD, THREADED
02-032454-00
KIT, 200MM GAS DISP PLATE ADJ.
03-00215-00
150MM GAS DISPERSION PLATE
05-00024-00
PM KIT, HTR CONN DUAL WITHOUT TEFLON SEALANT
15-00027-02
GUIDE, NOZZLE ADJUSTER
15-00043-02
PLATE, ADJUSTER CERAMIC GAS
15-00229-00
NUT
15-00309-01
HANGER, NOZZLE
15-00311-00
CAP, ELECTRICAL FEEDTHROUGH
15-00341-00
SCREW, NICKEL 1/4-20 x 1/4
15-00371-00
NUT, NICKEL, 1/4-20 HEX HEAD
15-00372-00
WASHER, NICKEL
15-00385-00
NUT, NICKEL, 10-32 HEX HEAD
15-00386-00
WASHER #10 NICKEL PLATE .003-.005 THICK
15-00399-02
SCREW, NICKEL, 8-32 x .96
15-00399-03
SCREW, NICKEL 8-32 X 40
15-00399-04
SCREW, NICKEL, 8-32 x 1.02
15-00399-05
SCREW, NICKEL, 8-32 x 1.12
15-00401-00
SPINDLE SHAFT, SS
15-00409-00
SEE 15-032014-00
15-00410-00
WINDOW UV FILTER
15-00457-00
SCREW, NICKEL, 10-32 x 24 HEATER ELECTRODE
15-00475-00
FEEDTHRU, TOP PLATE
15-00479-00
WHEEL, GENEVA
15-00553-05
SHIM, HEATER .005"
15-00553-10
SHIM, HEATER .010"
15-00553-31
SHIM, HEATER .031"
15-00554-05
SHIM V .005"
15-00554-10
SHIM V .010"

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