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NOVELLUS (VARIAN)

Part NumberDescription
00-664119-00
REAR PLATE SHIELD
00-664166-00
INSULATOR, CATHODE
00-664167-00
INSULATOR, ANODE CONMAG
00-664198-00
SHIELD, ANODE COVER
00-664205-00
SHIELD PRIMARY
00-664219-00
SHIELD PRESSURE PLATE CAV.
00-664266-00
ROLLER, FLAT ALIGNER
00-664281-00
CLAMP, SPLIT
00-664282-00
LOAD LOCK RAM SHIELD
00-664337-00
SHIELD, FRONT PLATE
00-671954-00
RF ETCH SHIELD
00-672057-00
WAFER CLIP (20 PER PKG)
00-672313-00
SHIELD, OUTER POLE PIECE
00-672406-00
SHUTTER, 150MM SOURCE
00-672852-00
00-672852-00
Bellow Assembly
00-673816-00
COMBINATION SHIELD KIT
00-674163-00
ANODE CAP
00-674493-01
SPRING, CERAMIC RING RETAINER (10 PER PACK)
00-674494-01
SPRING, CERAMIC SHIELD (10 PER PACK)
00-674505-00
4" CERAMIC RING
00-674780-00
HEATER SHIELD
00-674782-00
RING, CERAMIC 5"
00-674830-00
INSERT, RF ETCH TABLE
00-674846-00
SHIELD, SECONDARY
00-677791-00
CHAMBER SHIELD
00-677812-02
RING CLIP 4" CV
00-677815-01
CV MASK CLIP
00-677842-00
CERAMIC T-SLOT SHIELD, 5"
00-677895-01
SHIELD, T-SLOT 4"
00-678087-02
SS CLIP RING, 5"

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