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NOVELLUS (VARIAN) 3180 REPLACEMENT PARTS

Part NumberDescription
00-664167-00
ANODE INSULATOR
00-664198-00
ANODE COVER
00-664219-00
SHIELD PRESSURE PLATE CAV. (REF# ICS-00-684257-00)
00-664337-00
FRONT PLATE SHIELD
00-672057-00
WAFER CLIP (20 PER PKG)
00-673816-00
SHIELD, CONMAG COMBO
00-674163-00
ANODE CAP
00-674493-01
SPRING, CERAMIC RING RETAINER (10 PER PACK)
00-674494-01
SPRING, CERAMIC SHIELD (10 PER PACK)
00-674505-00
4" CERAMIC, RING CLIP
00-674780-00
SHIELD, P/P
00-674782-00
RING, CERAMIC CLIP 5"
00-677791-01
INNER SHIELD
00-677815-01
CV MASK CLIP
00-678087-02
CLIP RING 5" SST
00-684046-00
WASHER TURNER
00-684145-00
SHIELD , WAFER CLIP
00-684278-01
SHILED AY, L/L CONMAG
00-684281-00
SHIELD, SPLIT CLAMP RING
00-684648-00
SHUTTER, KEY
00-684748-00
SHIELD, HEATER 5
00-685403-00
CLAMP WELDMENT, SHUTTER KEY


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