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NOVELLUS (VARIAN) 3290 REPLACEMENT PARTS

Part NumberDescription
00-672313-00
OUTER, POLE PIECE
00-672406-00
SHUTTER, FLAT
00-674493-01
SPRING, CERAMIC RETAINER (10/PER PACK)
00-674494-01
SPRING, SHIELD RETAINER (10/PER PACK)
00-678476-01
INSERT, SUPPORT
00-678477-01
INSERT, PERFORATED
00-680574-00
SHIELD, PRESSURE
00-681028-00
COVER, BLANK OFF
00-682203-00
INSULATOR
00-682216-00
RING, CERAMIC
00-682216-SST
RING, 6" STAINLESS STEEL
00-682229-00
INSERT, CENTER POLE
00-682232-00
INSERT, POLE PIECE EXT.
00-682237-00
INSERT, POLE PIECE MIDDLE
00-682938-00
SHIELD, OUTER SUPPORT
00-683445-04
TABLE, RF ETCH
00-683521-01
SCREW, SHIELD SST
00-683707-01
SHIELD, T-SLOT 6"
00-683764-03
INSERT, RF ETCH
04-712083-01
SHIELD, CONFLAT HOLE
04-712083-03
SHIELD, SHUTTER FEEDTHRU
04-712090-01
SHUTTER, QUICK CHANGE FS
04-712093-01
SHIELD, REAR PLATE
04-712094-01
SHIELD, AL P/P RAM
04-712094-02
SHIELD, AL L/L RAM
04-712156-01
SHIELD, P/P RAM
04-712159-01
SHIELD, AY L/L RAM
04-712162-01
SHIELD, LOWER CHAMBER
04-712165-01
SHIELD, 6
04-712186-01
COLLAR, P/P RAM PAD

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