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TEGAL

Part NumberDescription
33-337-001
INNER BELLOWS
33-338-001
BELLOWS OUTER
33-349-004
ELECTRODE, CONDEHEAD UPPER
37-221-001
UPPER ELECT, .014 HOLE NO RAD.
37-221-002
UPPER ELECT ANOD, NON ANODIZED
37-221-003
UPPER ELECT ANOD., .021 HOLE RAD. HOLE
39-292-003
UPPER ELECTRODE
39-306-001
UPPER ELECTRODE 10 HOLE
39-424-001
ELECTRODE LOWER 5"
39-676-001
ELECTRODE, UPPER WAFER JACKET
39-680-003
ELECTRODE, CONEHEAD VENTED
39-680-005
ELECTRODE, UPPER VENTED HARD ANOD.
39-700-007
ELECTRODE, HEATED UPPER
39-709-002
ELECTRODE, LOWER 5"
39-714-006
SHELF WAFER
39-735-003
ELECTRODE, LOWER 5"
39-735-007
ELECTRODE, LOWER 5"
39-735-008
ELECTRODE, LOWER ANODIZED 6"
39-741-004
ELECTRODE, LOWER 6"
39-741-009
ELECTRODE, LOWER 6
39-741-010
ELECTRODE, LOWER 5"
39-741-011
LOWER ELECTRODE 4"
39-754-009
ELECTRODE, LOWER 5"
39-754-010
ELECTRODE, RAD. COMP. 6"
39-832-004
ELECTRODE, TEMP. CONT. ANODIZED
40-014-001
WINDOW PHOTOCELL
40-112-001
RING, CERAMIC CHAMBER
40-133-001
WINDOW, SAPPHIRE ROD
40-136-001
INSULATOR CRADLE 100MM
40-140-001
RING, CERAMIC INSULATOR

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