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T. E. L.

Part NumberDescription
1805-220008-11
WINDOW, VIEW PORT
1805-220012-14
OTR FOCUS RING, QTZ
1810-221018-14
SHIELD RING, T5 MODIFICATION, CERAMIC
1810-221329-12
SHIELD RING
1810-221439-02
UPPER ELECTRODE, SILICON
1810-221470-24
UPPER ELECTRODE, SILICON CRYSTAL
1810-221471-24
UPPER ELECTRODE, SILICON
1810-222433-11
RING, INNER
1810-222443-11
RING, INNER 8K-ESC MODIFICATION, CERAMIC
1810-222662-11
SHIELD RING, QUARTZ LOW SODIUM GE144
1810-323878-14
INNER FOCUS RING, SILICON CYRSTAL
1810-324934-13
BELLOWS COVER
1810-428037-11
BUSHING, RING SHIELD
1810-428038-12
SCREW, SET RING SHIELD
1810-428721-11
SCREW, BELLOWS
1D05-300052-13
INSULATOR RING A7
1D10-100327
BAFFLE PLATE
1D10-101475-11
BAFFLE PLATE A
1D10-101475-11W
BAFFLE PLATE A, REWORK
1D10-201429-15
UPPER ELECTRODE
1D10-201588-12
UPPER ELECTRODE, W/MONITOR
1D10-202177-12
UPPER ELECTRODE, VESPEL INSERT
1D10-202204-12
UPPER ELECTRODE, VESPEL INSERT, W/MONITOR
1D10-204338-13
UPPER ELECTRODE
1D10-204418-12
BELLOW COVER
1D10-30052-13
INSULATOR RING, QUARTZ
1D10-302209-14
SILICON FOCUS RING
1D10-303124-16
DEPO SHIELD
1D10-303124-16W
GAS RING, REWORK
1D10-303124-21
SHIELD RING

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