LAM RESEARCH

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LAM RESEARCH

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LAM RESEARCH

Part Number	Description
2101363	WAFER CLAMP
601124	BAFFLE
601179	BAFFLE PLATE
601187	PLATE-DIFF, ANOD (100, 125, 150MM)
601224	DIFFUSER PLATE
602250	BAFFLE PLATE TOP
713-004108-001	ANODE PLUG, TEFLON
713-011545-002	SLEEVE, PLUNGER GUIDE
713-011546-002	SLEEVE, PLUNGER GUIDE
713-011548-001	SLEEVE, PLUNGER GUIDE
713-011558-001	RING, ELECTRODE INSULATOR
713-011560-001	RING, SHROUD
713-011564-002	SLEEVE, PLUNGER GUIDE
713-011572-001	INSERT, THREAD SCREW
713-011574-001	PLUNGER, WAFER CLAMP
713-011575-001	NUT, RETAINER
713-011576-001	ALIGNMENT PIN, CLAMP
713-011577-001	WASHER, CLAMP RETAINING
713-011578-001	SLEEVE, PLUNGER GUIDE
713-011578-003	SLEEVE, PLUNGER GUIDE
713-011579-001	GUIDE, PLUNGER
713-011584-001	PLUNGER, WAFER CLAMP
713-011585-001	COVER, CLAMP BOLT
713-011585-004	COVER, BOLT CLAMP
713-011752-001	INSERT, 6-32 THREAD
713-011760-001	WASHER, EDGE, FOCUS, RING
713-011803-002	RING, ELECTRODE CLAMP
713-011926-001	CAP, BOLT ELEC.
713-011928-001	CAP BOLT ELECTRODE
713-011980-001	HOUSING, PLUNGER

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