NOVELLUS (VARIAN) 3180 REPLACEMENT PARTS

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Part Number	Description
00-664167-00	ANODE INSULATOR
00-664198-00	ANODE COVER
00-664219-00	SHIELD PRESSURE PLATE CAV. (REF# ICS-00-684257-00)
00-664337-00	FRONT PLATE SHIELD
00-672057-00	WAFER CLIP (20 PER PKG)
00-673816-00	SHIELD, CONMAG COMBO
00-674163-00	ANODE CAP
00-674493-01	SPRING, CERAMIC RING RETAINER (10 PER PACK)
00-674494-01	SPRING, CERAMIC SHIELD (10 PER PACK)
00-674505-00	4" CERAMIC, RING CLIP
00-674780-00	SHIELD, P/P
00-674782-00	RING, CERAMIC CLIP 5"
00-677791-01	INNER SHIELD
00-677815-01	CV MASK CLIP
00-678087-02	CLIP RING 5" SST
00-684046-00	WASHER TURNER
00-684145-00	SHIELD , WAFER CLIP
00-684278-01	SHILED AY, L/L CONMAG
00-684281-00	SHIELD, SPLIT CLAMP RING
00-684648-00	SHUTTER, KEY
00-684748-00	SHIELD, HEATER 5
00-685403-00	CLAMP WELDMENT, SHUTTER KEY

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