TEGAL

ICS-33-337-001 BELLOWS, INNER
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ICS-33-337-017 INNER BELLOWS
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ICS-33-338-001 OUTER BELLOWS
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ICS-33-349-004 ELECTRODE UPPER CONE HEAD
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ICS-33-527-002W BELLOWS, CHUCK PIN LIFT, REWORK
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ICS-37-1031-001 SPR, WAFERLAND LIFTAB 150MM
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ICS-37-221-001 UPPER ELECTRODE
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ICS-37-221-002 UPPER ELECTRODE
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ICS-37-221-003 SHOWERHEAD, H.P., ANODIZED
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ICS-37-439-003 UPPER ELECTRODE REV 3..WITHOUT MAGNETS
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ICS-37-439-003 R3 UPPER ELECTRODE WITHOUT MAGNETS
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ICS-37-440-007 NOZZLE, CERAMIC 6500 HRE2
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ICS-39-297-002 QUARTZ PIN
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ICS-39-306-001 UPPER ELECTRODE 10 HOLE
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ICS-39-424-001 TEFLON INSULATOR OUT OF SPEC
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ICS-39-627-004IR ELECTRODE RING 901E
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ICS-39-662-001 CHAMBER WALL 1.56
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ICS-39-662-002 TRIODE WALL CHAMBER
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ICS-39-676-001 ELECTRODE UPPER (H2O) JACKET
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ICS-39-680-003 ELECTRODE CONE HEAD VENTED
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ICS-39-680-005 ELECTRODE UPPER VENTED ANODIZED
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ICS-39-700-003W UPPER ELECTRODE REWORK
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ICS-39-700-007 ELECTRODE HEATED, UPPER
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ICS-39-709-002 ELECTRODE LOWER 5"
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ICS-39-714-006 SHELF WAFER
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ICS-39-733-003 TEGAL 901E 5" LOWER ELECTRODE, OEM SPEC FINISH
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ICS-39-733-004 6" LOWER ELECT
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ICS-39-735-003 LOWER ELECTRODE 5"
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ICS-39-735-004 TEGAL 903E LOWER ELECTRODE..NON-ANODIZE
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ICS-39-735-007 LOWER ELECTRODE
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ICS-39-735-008 ELECTRODES
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ICS-39-741-001 LOWER ELECTRODE
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ICS-39-741-004 ELECTRODE LOWER 6"
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ICS-39-741-009 ELECTRODE LOWER 6" FLAT
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ICS-39-741-009M LOWER ELECTRODE, MODIFIED, NO FLAT
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ICS-39-741-010 ELECTRODE LOWER 5"
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ICS-39-741-011 4" ELECTRODE
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ICS-39-754-009 LOWER ELECTRODE 5"
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ICS-39-754-010 ELECTRODE RAD. COMP. 6"
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ICS-39-832-002 ELECTRODE TEMP. CONT. ANODIZED
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ICS-39-832-004 ELECTRODE TEMP. CONT. ANODIZED
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ICS-39-832-005 ELECTRODE, WITHOUT COOLING TUBE
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ICS-39-927-008 6" LOWER ELECTRODE FOR ..THROUGH THE WALL TEGAL 903E
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ICS-40-1052-150 END EFFECTOR 150 MM WAFER
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ICS-40-112-001 RING CERAMIC CHAMBER
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ICS-40-133-001 WINDOW, SAPPHIRE, ROD
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ICS-40-140-001 RING INSULATOR, CERAMIC
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ICS-40-159-001 ROD, SAPPHIRE
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ICS-40-159-002 ROD, SAPPHIRE
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ICS-40-244-002 INSULATOR RING
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ICS-40-249-002 LOWER ELECTRODE DISC 5"
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ICS-40-249-003 DISC., CERAMIC LOWER ELECTRODE 6"
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ICS-40-260-001 WINDOW, SAPPHIRE
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ICS-40-261-002 INSULATOR PAD
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ICS-40-275-001 UPPER INSULATOR
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ICS-40-276-001 LOWER INSULATOR
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ICS-40-279-001 SHIELD DIAPHRAGM
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ICS-40-284-005 RING, QUARTZ
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ICS-40-289-002 TOWER ELECTRODE MACOR 5"
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ICS-40-295-003 RING, ELECTRODE
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ICS-40-297-001 PIN, QUARTZ
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ICS-40-297-001C PIN, CERAMIC
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ICS-40-297-002 QTZ PIN
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ICS-40-297-002C CERAMIC PIN
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ICS-40-297-002C-M PIN, CERAMIC, MODIFIED 2.2" LONG
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ICS-40-297-01C PIN, CERAMIC
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ICS-40-297-02C PIN, CERAMIC VERSION
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ICS-40-304-001 INSULATOR LOWER ELECTRODE
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ICS-40-306-002 CERAMIC RING LOWER ELE
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ICS-40-395-001 CASTELLATED RING, W/ NO FLAT 6" CERAMIC
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ICS-40-395-002 RING, PROCESS 5"
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ICS-40-395-003 RING CERAMIC RAISED ELECTRODE 5"
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ICS-40-430-003 6" CERAMIC CASTELLATED RING WITH PIN ALIGNMENT HOLE
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ICS-40-499-005 INSULATOR, UPPER, RETAINED
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ICS-40-499-010 INSULATOR, UPPER OVERLAP CERAMIC
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ICS-40-516-005 CERAMIC INSULATOR 4"
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ICS-40-516-006 RING, RAD CLAMP
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ICS-40-516-007 RING INSULATOR, MACOR
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ICS-40-526-003 CLAMP 6" WTC
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ICS-40-527-003 RETAINER 6" WTC
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ICS-40-585-003 RING, ELECT, INSULATOR, UPPER, PEEK
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ICS-40-606-010 QUARTZ LINER 0.2 THK OVERLAP
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ICS-40-606-013 LINER, CERAMIC 2" THK OVRLP
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ICS-40-788-615 RING, CENTER, ESC 6" JEIDA CERAMIC
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ICS-40-789-003 INSULATOR, UPPER FOCUS, QUARTZ, CUSTOMER # 510220
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ICS-40-789-004 INSULATOR, UPPER FOCUS CERAMIC
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ICS-40-790-001 LOWER FOCUS RING, CERAMIC, MUST HAVE SERIAL #, RA INSPECTION & 510588 ADDED TO ENGRAVING
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